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◆有机类高纯气体
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| 气体 |
名称 |
规格 |
杂质含量（PPM） |
| CH4 |
甲烷 |
Methane |
99.99～99.995% |
4N级THC≤5，N2≤50,H2O≤15，O2≤30 |
| C2H6 |
乙烷 |
Ethane |
99.9～99.99% |
3N级N2+O2≤500，，THC≤450，H2O≤15 |
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4N级N2+O2≤70，THC≤20，H2O≤5 |
| CH3CL |
氯甲烷 |
Methyl Chloride |
99.5% |
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| C2H5CL |
氯乙烷 |
Ethyl Chloride |
99.7% |
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| C2H4O |
环氧乙烷 |
Ethylene Oxide |
99.9% |
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| C3H8 |
丙烷 |
Propane |
99～99.99% |
4N级C3H6≤1，i-C4H1075，C2H8≤1，CH4≤1，N2+O2≤20 |
| n-C4H10 |
正丁烷 |
N-Butane |
99.5～99.99% |
4N级THC≤100 |
| C2H2 |
乙炔 |
Acetylene |
99.8～99.9% |
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| i-C4H10 |
异丁烷 |
Isobutane |
99.5～99.99% |
4级C2H4≤2，C3H8≤2，n-C4H10≤6，C4H8-1≤2，i-C4H8≤30，CH4≤50， |
| C2H4 |
乙烯 |
Ehtylene |
99.95～99.99% |
4N级H2≤5，C2H6≤50，CO2≤5，C2H2≤5，H2O≤502≤5,CO≤5,CH4≤20 |
| C3H6 |
丙烯 |
Propylene |
99.9～99.99% |
4N级H2≤1,THC≤100,CO2+CO≤5 |
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